Prototype development of a roller imprint system and its application to large area polymer replication for a microstructured optical device

In this study, the prototype of a thermal roller imprint lithography (RIL) system was developed and applied to RIL tests to evaluate its feasibility for the large area replication of an optical micro device. The developed system adapts an automatic stamp releasing mechanism and has the capacity to replicate ultra-precision structures on an area of 100 mm × 100 mm at the scanning speed range of 0.1–10 mm/s. For RIL tests, 1 mm-thick polyethylene terephthalate (PET) plastic plates and 100 μm-thick cycloolefin resin films were used as imprint materials. All samples were 100 mm × 100 mm in size. The combination of a thin and flexible polymer film and an elastomeric adhesive sheet was effective for both rapid processing and uniform replication. For given RIL conditions (700 N press force and Tg + 50 °C roller temperature), the complete filling for a 1 mm-thick PET sample was achieved at the roller scan speeds of 0.1 mm/s, whereas that for a 100 μm-thick cycloolefin sample could be obtained at the roller scan speeds of <2 mm/s with much better replication uniformity over a whole surface area. Finally, a light guide plate (LGP) for a back light panel was fabricated by RIL.