Micro cutting of V-shaped cylindrical grating template for roller nano-imprint

The roller nano-imprint technology is considered as efficient and low cost method for the large scale micro-pitch grating fabrication. The surface quality of the V-shaped grooves for roller grating template developed by diamond tool cutting process is investigated. The surface quality of the micro V-shaped grating is optimized with minimized burr formation by optimizing the cutting tool's shape design and the micro-cutting process, based on the chip morphology and non-free chip interference analyses. Burr shows different variation with the grating pitch of 10–20 μm and less than 2 μm. The burr formation mechanism for V-shaped micro-cutting is studied by material (H62 Copper) metallography and homogeneity analyses. Finally, high precision grating template with various pitches is successfully achieved.

► Study the V-shaped micro-cutting by chip morphology and non-free chip interference.
► The rake face angle and multi-steps were optimized to suppress the burr formation.
► Burr shows different variation with the grating pitch of 10–20 μm and less than 2 μm.
► The burr formation mechanism was clarified by metallography and elements analysis.
► The FIB images were proposed to effectively distinguish the metallography difference.