Increase of process reliability in the micro-machining processes EDM-milling and laser ablation using on-machine sensors

In micro production micro electric discharge machining (μEDM) and laser ablation are two established manufacturing methods. Due to the thermal material removal mechanism there are some challenges to provide the needed process reliability. In both cases it is important to ensure a precise manufacturing process by the correct positioning of the tool, e.g. the laser spot, relative to the work piece and the measurement and elimination of geometrical deviations.Using the EDM-milling process to manufacture small cavities a deviation of the manufactured depth and a waviness of the surface may appear if the compensation of the tool wear does not work correctly. A confocal white-light sensor can be used to measure the surface of the machined cavity after the EDM process. An on-machine system provides the possibility to rework the work piece without unclamping it. Combining these two procedures in an automatic working quality loop the accuracy of the manufactured depth can be improved down to a maximum deviation of less than 2 μm. Regarding the laser ablation process using ultra short pulsed Nd:YAG lasers problems arise if the focal plane is not on the surface of the work piece. Due to the manufacturing in layers occurring deviations in the surface remain until the end of the machining process. In this work an acoustical sensor is used to provide a correctly adjusted focal plane at the beginning of the first manufacturing step. Acoustic emissions are detected during the ablation process. A signal analysis of the airborne sound spectrum emitted by the process enables specific conclusions about the focal position of the laser beam. Based on this correlation an acoustic focus positioning is built up and tested on a ceramic work piece. The focal plane can then be adjusted automatically before the ablation.