Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges

This paper presents the derivation of the kinetostatic model of a flexure-based 3-RRR compliant micro-motion stage. The kinetostatic model has closed-form equations and flexure hinge compliances are one of the variables in the model. Researchers have an option of selecting the most suitable flexure hinge compliance equations to calculate the kinetostatics of the stage. Two cases are studied where two kinetostatic results are obtained using two different sets of flexure hinge equations. The kinetostatic results are compared to the finite-element-analysis results to verify their accuracies.