The study of ultrasonic vibration assisted polishing optical glass lens with ultrasonic atomizing liquid

In this paper, our study is ultrasonic vibration assisted polishing optical glass lens with ultrasonic atomizing liquid. The ultrasonic vibration is applied to the axial direction of the main shaft, which can make abundant grains to impact the workpiece with the high-frequency reciprocating style. And the ultrasonic atomizing liquid is applied to the nozzle in order to make grains more homogeneous and decrease clustering phenomenon, which can improve the surface quality. The material removal rate model of single and multiple grains in the holes and micro-peaks of the polishing head are established by analyzing the removal mechanism of ultrasonic vibration assisted polishing for optical glass lens with ultrasonic atomizing liquid. Several sets of experiments were designed and the optical glass lenses were polished through contrast experiment. The contrast experiment results show that the material removal rate of ultrasonic assisted polishing of optical glass lens with ultrasonic atomizing liquid is better than that of one-dimensional ultrasonic assisted polishing and common polishing. And the surface roughness of ultrasonic vibration assisted polishing with ultrasonic atomizing liquid can reach 2 nm. And the results of experiments can be seen that the removal rate of the material is related to the abrasive grain diameter, the rotational speed and the feed rate of polishing head, and the ultrasonic amplitude. The experimental results are basically consistent with the prediction model.