کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8130480 | 1523204 | 2016 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Performance optimization of high-order Lamb wave sensors based on silicon carbide substrates
ترجمه فارسی عنوان
بهینه سازی عملکرد سنسورهای موج بلند بر اساس سیارک های کارباید
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
آکوستیک و فرا صوت
چکیده انگلیسی
Silicon carbide (SiC), as a new type of material for substrates in micro-electromechanical system (MEMS), was given high consideration in virtue of the properties of high acoustic velocity, low loss, chemical resistance, and etc. In this work, five performance parameters, which are electromechanical coupling coefficients, mass sensitivities, conductivity sensitivities, insert losses and minimum detectable masses, are theoretically investigated in Lamb wave chemical sensors for gas sensing based on SiC substrates. It is presented that higher performance can be achieved based on high-order modes other than fundamental modes, and the abovementioned five parameters can be simultaneously optimized. Then, according to the optimized operating conditions, operating parameters of the SiC-based high-order Lamb wave sensors are designed, which can be easily realized in MEMS technology. Finally, it is demonstrates that the SiC-based sensor exhibits better performance than that of the sensor with a conventional silicon substrate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultrasonics - Volume 65, February 2016, Pages 296-303
Journal: Ultrasonics - Volume 65, February 2016, Pages 296-303
نویسندگان
Zhe Chen, Li Fan, Shu-yi Zhang, Hui Zhang,