کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8130580 1523213 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Lifetime of high-order thickness resonances of thin silicon membranes
ترجمه فارسی عنوان
عمر رزونانس های ضخامت بالا از غشاهای سیلیکونی نازک
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم آکوستیک و فرا صوت
چکیده انگلیسی
Femtosecond laser pulses are used to excite and probe high-order longitudinal thickness resonances at a frequency of ∼270 GHz in suspended Si membranes with thickness ranging from 0.4 to 15 μm. The measured acoustic lifetime scales linearly with the membrane thickness and is shown to be controlled by the surface specularity which correlates with roughness characterized by atomic force microscopy. Observed Q-factor values up to 2400 at room temperature result from the existence of a local maximum of the material Q in the sub-THz range. However, surface specularity would need to be improved over measured values of ∼0.5 in order to achieve high Q values in nanoscale devices. The results support the validity of the diffuse boundary scattering model in analyzing thermal transport in thin Si membranes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultrasonics - Volume 56, February 2015, Pages 116-121
نویسندگان
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