A new piezomagnetic film force sensor model for static and dynamic stress measurements

In this study, an Fe73.5Cu1Nb3Si13.5B9 amorphous alloy film was used as a sensing chip for the development of a novel piezomagnetic force sensor model with a closed inductance loop. The sensor exhibits an excellent anti-interference ability against the electromagnetic effects from the environment. Reliable data is obtained at temperatures smaller than 60 °C. Furthermore, the piezomagnetic properties of the Fe73.5Cu1Nb3Si13.5B9 films annealed at different conditions were investigated. After annealing at 350-555 °C, the elastic hysteresis of the sensing chip was weakened, which is beneficial in dynamic stress measurements. The optimal stress range for static and dynamic measurements is 0-2 kPa, where the sensitivity is 3.5 μH/kPa. When the annealing temperature is 150 °C, the piezomagnetic effect of the film is significant and elastic hysteresis is obvious, which is suitable only for static stress measurements. In the range 0-10 kPa, the force-sensitivity performance curve is linear with a sensitivity of 3 μH/kPa, which demonstrates its excellent force-sensitivity properties.