کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
819184 | 906544 | 2011 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation A novel atomic force microscopy based lithography system for automated patterning via anodic oxidation](/preview/png/819184.png)
چکیده انگلیسی
An Atomic force microscopy (AFM) based lithography system is successfully designed and constructed for automated patterning through local anodic oxidation. We present the detailed design of this system, where a novel technique is introduced by utilizing a motorized high precision XY stages to provide precise pattern movements while the AFM tip remains stationery. Several in-house hardware such as source measure unit and microscope imaging camera are integrated and controlled by a software tool. Numerous oxide structures are successfully created to demonstrate the ability of this low cost and accurate system, including a 30 μm long cantilever.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Composites Part B: Engineering - Volume 42, Issue 3, April 2011, Pages 456-461
Journal: Composites Part B: Engineering - Volume 42, Issue 3, April 2011, Pages 456-461
نویسندگان
Y.J. Gan, H.Y. Wong, W.P. Lee,