Analysis of thermoelastic damping in micro- and nanomechanical resonators based on dual-phase-lagging generalized thermoelasticity theory

In this work the thermoelastic damping of a micro-beam resonator is analyzed by the generalized thermoelasticity theory based on the dual-phase-lagging thermal conduction model. An explicit formula of thermoelastic damping has been derived. Influences of the beam height, aspect ratio and the ratio of temperature relaxation time to the heat flux relaxation time are examined. Numerical results show that the thermoelastic damping at nano-scales based on the non-Fourier theory may exceed the maximum values of Lifshitz–Roukes’ model and Zener’s approximation. Values of thermal relaxation constants and their ratio have strong influence on thermoelastic damping at nano-scales. This work may bring new insights to the exploration of thermoelastic damping in micro resonators on the submicrometer or nanometer scales.

► Analysis of thermoelastic damping based on the non-Fourier thermoelasticity theory.
► Thermoelastic damping at nanoscale increases with the decrease of the size of resonator.
► Strong impact of values of thermal relaxation constants on thermoelastic damping at nanoscale.
► Influence of ratio of thermal relaxation constants on thermoelastic damping at nanoscale.