کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
826407 | 907924 | 2014 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Crossed ring anchored disk resonator for self-alignment of the anchor
ترجمه فارسی عنوان
رشته متقاطع لنگر روی دیسک برای خود تنظیم تراز لنگر
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی (عمومی)
چکیده انگلیسی
Misalignment is a problematic challenge in RF MEMS resonators. It causes asymmetry in the ultra symmetric radial contour mode disk resonators and degrades their performance by increasing the insertion loss and decreasing their quality factors (Q). Self-alignment method seems to be a good solution for misalignment problem, but it cannot be directly applied on high performance ring shape anchored resonators. This paper discusses misalignment effects for the ring shape anchored resonators and proposes a method for reconfiguring its anchor to be compatible with self-alignment process. Simulation results validate that the crossed ring anchor structure has the same resonance characteristics with the complete ring shape anchored resonator.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Advanced Research - Volume 5, Issue 1, January 2014, Pages 109–115
Journal: Journal of Advanced Research - Volume 5, Issue 1, January 2014, Pages 109–115
نویسندگان
Masoud Baghelani, Habib Badri Ghavifekr, Afshin Ebrahimi,