Investigation of scanning electron beam parameters in terms of the disk-charged approximation for the sample potential

A theoretical investigation of electron behavior inside the scanning electron microscope chamber for the mirror image operation mode has been carried out. The equation of motion of this head-incident electron is derived in terms of the energy conservation law. By solving this equation the influence of beam parameters are investigated. Results have shown that a good comprehend and interpret for the physical behaviors of scanning electron can be extracted. It is found that the beam current may be used to control mirror images only in the lower values of scanning potential. Also the size of scanning beam has no effect on mirror image as long as the beam current is kept fixed.