Love wave in ZnO/SiO2/Si structure with initial stresses

The propagation of elastic waves in the layered piezoelectric media with inhomogeneous initial stresses was analyzed through the method of transfer matrix. Firstly, the governing equations of motion for the prestressed piezoelectric media are derived on the basis of the nonlinear continuum mechanics. Secondly, the transfer matrix for the Love waves in the piezoelectric media (ZnO/SiO2/Si structure) is presented. Solutions are obtained by the transfer matrix method. Thirdly, numerical calculations are given for the ZnO/SiO2/Si structure. It is found that the middle layer SiO2 and the initial stress in layers affect the phase velocity, group velocity and electromechanical coupling coefficient obviously. These results are important in the surface acoustic wave devices.