The effect of SU-8 patterned surfaces on the response of the quartz crystal microbalance

In this work we present data showing the effect of patterning layers of SU-8 photoresist on a quartz crystal microbalance (QCM) and subsequent chemical treatment to increase their hydrophobicity. Patterns with 5 μm diameter pillars spaced every 10 μm have been fabricated with heights of 3, 5 and 10 μm in addition to equivalent thickness flat layers. Contact angle measurements have been made before and after the hydrophobic chemical treatment. The change in resonant frequency of the QCM has been investigated as the surfaces were submerged in solutions of water/PEG with changing viscosity-density product.