A method for cross-sensitivity and pull-in voltage measurement of MEMS two-axis accelerometers

An electronic circuit for the characterization of two-axis accelerometers is presented, implementing a non-linear method which reduces the effect of parasitic signals. Single-ended and differential measurements were used to extract a value of 0.15 for the cross-sensitivity of the device. Other parameters, like the pull-in voltage, the quality factors and the resonance frequencies, are extracted as well. Curves of the frequency response at different pressure levels, and with different dc bias voltages are presented.