کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699707 | 1461937 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A double heater integrated gas flow sensor with thermal feedback
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A double heater integrated gas flow sensor with thermal feedback A double heater integrated gas flow sensor with thermal feedback](/preview/png/9699707.png)
چکیده انگلیسی
An integrated thermal sensor for flow rates below 200Â sccm, consisting of two central heaters and two thermopiles, located downstream and upstream with respect to the heaters, is presented. The sensor, fabricated by post-processing chips produced with a standard microelectronic process, is operated in closed loop configuration through a single operational amplifier, in such a way that the flow-induced temperature difference between the two thermopiles is cancelled by applying a power mismatch to the two heaters. The output signal is proportional to the heater power unbalance. Static and dynamic electrical characterization of the sensor is performed. The response to nitrogen flow rates has been measured for various gas pressures.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 210-215
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 210-215
نویسندگان
Paolo Bruschi, Alessandro Diligenti, Dino Navarrini, Massimo Piotto,