کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9699722 1461937 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
End-fire coupling of a SU-8 waveguide to a silicon mesa photodiode: Integrability in an optical analysis microsystem
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
End-fire coupling of a SU-8 waveguide to a silicon mesa photodiode: Integrability in an optical analysis microsystem
چکیده انگلیسی
This work deals with mesa silicon photodiodes and SU-8 ridge waveguides fabrication and their coupling by means of an end-fire configuration. Both photodiodes and waveguides are electrically and optically characterized and are expected to be used as optical power measurement devices for integration in a miniaturized optical analysis system. The integrability of the devices is studied through an analysis of the further steps necessary to build a complete optical analysis microsystem and the feasibility of such device is empirically anticipated.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123–124, 23 September 2005, Pages 313-318
نویسندگان
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