Highly sensitive thermopile heat power sensor for micro-fluid calorimetry of biochemical processes

A micro-fluid chip calorimeter measuring system with highly stable thermostat (0.1 mK) was developed based on an improved nano calorimetry thin-film thermopile chip with excellent chemical and mechanical reliability fabricated in SU-8 technology for insulation and passivation layers. Biochemical processes (e.g. enzyme catalyzed reaction) can be investigated with heat power detection limit <100 nW.