کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699746 | 1461937 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning](/preview/png/9699746.png)
چکیده انگلیسی
A silicon resonant torsional micro-mirror excited by piezoelectric bimorph actuators is presented. The bimorph actuators consist of a single-crystal silicon flexible beam or membrane and a PZT thin film. The mechanical elements are etched in the 20 μm thick superficial layer of a SOI substrate, thereby ensuring the flatness of the 500 μm-diameter gold-coated mirror. This device achieves optical beam scanning with large angular deflection at high frequency. In air, we have measured scanning up to 19.8° at 1.8 kHz, 99.1° at 10.6 kHz and 40.8° at 25.4 kHz. The applied driving voltage is sinusoidal with an amplitude under 42 VPP and with a 6 VDC bias voltage. At large oscillation amplitude, a non-linear hard-spring effect has been observed. In vacuum, a 78° optical scanning has been obtained with less than 1 VPP.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 483-489
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 483-489
نویسندگان
F. Filhol, E. Defaÿ, C. Divoux, C. Zinck, M.-T. Delaye,