کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699753 | 1461937 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Simulation of shaped comb drive as a stepped actuator for microtweezers application
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
Finite element analysis is used to simulate electrostatic actuated, shaped comb drives operating under dc conditions (zero actuating frequency). A dynamic multiphysics model is developed using the arbitrary Lagrangian-Eulerian (ALE) formulation. Results show the coupled interaction between the electrostatic and mechanical domains of the transducer. The analysis is based on the evolution of electrostatic force versus comb finger engagement. The relationship between incremental lateral displacement and actuation voltage illustrates the potential for stepped movement for a shaped comb drive. Additionally, through numerical simulations, this project determines an optimum design for a dc-actuated comb drive, which has controllable force output and stable engaging movement.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 540-546
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 540-546
نویسندگان
Isabelle P.F. Harouche, C. Shafai,