کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9699761 1461937 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of nanofluidic devices in glass with polysilicon electrodes
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Fabrication of nanofluidic devices in glass with polysilicon electrodes
چکیده انگلیسی
In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123–124, 23 September 2005, Pages 602-607
نویسندگان
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