کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699763 | 1461937 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of ultrasonic arrays with 7 μm PZT thick films as ultrasonic emitter for object detection in air
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication of ultrasonic arrays with 7 μm PZT thick films as ultrasonic emitter for object detection in air Fabrication of ultrasonic arrays with 7 μm PZT thick films as ultrasonic emitter for object detection in air](/preview/png/9699763.png)
چکیده انگلیسی
Lead zirconate titanate (PZT) thick films with thickness up to 20 μm with relatively good property have been deposited on silicon wafers using a modified sol-gel slurry process. Submicrosized or nanosized PZT powder was dispersed into regular PZT sol-gel solutions to prepare the composite film. Ultrasonic arrays have been fabricated with 7 μm PZT thick film on the silicon membrane diagrams. The property of the PZT thick film, the fabrication process, the vibration characteristics and the ultrasonic emission property of the fabricated arrays are reported. The ultrasonic transducer can generate ultrasound with pressures up to 3.6 Pa.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 614-619
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 614-619
نویسندگان
Hong Zhu, Jianmin Miao, Zhihong Wang, Changlei Zhao, Weiguang Zhu,