کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9700810 | 1462130 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
3D FE simulation of H2 SAW gas sensor
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this work, a three-dimensional finite element (3D FE) model of a two-port surface acoustic wave (SAW) delay line based hydrogen sensor on XY lithium niobate (LiNbO3) substrate with a palladium thin film is developed and simulated. This simulation is performed using ANSYS Version 6.1 platform. Changes in the propagation characteristics of the SAW in terms of the time delay in the voltage and particle displacements due to exposure of palladium thin film to hydrogen and insertion loss of the device are studied. Also, the impulse response of the device is simulated, from which the frequency response and hence the center frequency and insertion loss of the sensor is determined. The 3D representation of the surface acoustic wave propagation on the substrate is demonstrated.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volumes 111â112, 11 November 2005, Pages 213-218
Journal: Sensors and Actuators B: Chemical - Volumes 111â112, 11 November 2005, Pages 213-218
نویسندگان
Massood Z. Atashbar, Bradley J. Bazuin, M. Simpeh, S. Krishnamurthy,