کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9700970 | 1462132 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Humidity sensing properties of CNx film by RF magnetron sputtering system
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Humidity sensing properties of CNx film by RF magnetron sputtering system Humidity sensing properties of CNx film by RF magnetron sputtering system](/preview/png/9700970.png)
چکیده انگلیسی
Humidity sensing properties of carbon nitride (CNx), which is a new material for humidity sensors, have been investigated and a simple model for water molecular adsorption in carbon nitride surface has been suggested. Carbon nitride films were deposited on silicon substrate with meshed electrodes by reactive RF magnetron sputtering system. The film revealed not only good humidity-impedance characteristics but also relatively quick response to relative humidity changes. When water molecules attack the carbon nitride surface, the CN bonds break up and the released nitrogens and carbons form CHO and NHO bonds. It can be expected that CNx thin films can be used for Si-based micro-humidity sensors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 108, Issues 1â2, 22 July 2005, Pages 450-454
Journal: Sensors and Actuators B: Chemical - Volume 108, Issues 1â2, 22 July 2005, Pages 450-454
نویسندگان
Ji Gong Lee, Sung Pil Lee,