Structure and magnetic properties of Co-Pt-Ta2O5 film for perpendicular magnetic recording media

Co-Pt-Ta2O5 film was investigated for perpendicular magnetic recording media. Perpendicular coercivity of over 3 kOe was obtained when the film was deposited at high Ar gas pressure of 7 Pa, where Ta existed in a state of metal-oxide mixture in the film. It was indicated that grain isolation was obtained in the film. On the other hand, no increase in the coercivity was obtained by deposition introducing oxygen gas into Ar gas, although a fraction of oxidized Ta increased.