High coercive FePt alloys prepared by a new sputtering method

Fe-Pt films have been prepared on glass substrates kept at room temperature by a new sputtering method of multipolar magnetic plasma confinement. In the films having near stoichiometric composition of 53 at%Pt, the transition temperature from the disordered Fe-Pt FCC to the L10-ordered phase can be decreased drastically to 300 °C, where the clear peaks indicating L10 structure and then the high coercivity of 7 kOe appear. This paper discusses the effects of the sputtering condition on the ordering temperature and the crystalline structure.