کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9834623 | 1524912 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Radical nitridation of Al films for the barrier formation in ferromagnetic tunnel junctions
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Nitridation process of Al films using microwave-excited plasma was investigated to realize highly qualified Al-N barrier for magnetic tunnel junctions (MTJs), in comparison with reactive deposition process of Al-N films. The MTJs fabricated by the plasma nitridation method with Kr+N2 or Ar+N2 mixed gas showed larger values of tunnel magnetoresistance (TMR) ratio and resistance-area product (RÃA) than those of the MTJs fabricated with He+N2 plasma. The MTJs with reactive-deposited Al-N showed relatively small values of TMR ratio and RÃA. From the optical emission spectroscopy of the respective plasma, we concluded that N2 ion in the plasma is a responsible factor for lowering the barrier height of Al-N and that radical nitridation process is suitable to form the barriers without inducing defects.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Magnetism and Magnetic Materials - Volume 286, February 2005, Pages 162-166
Journal: Journal of Magnetism and Magnetic Materials - Volume 286, February 2005, Pages 162-166
نویسندگان
Masakiyo Tsunoda, Toshihiro Shoyama, Satoru Yoshimura, Migaku Takahashi,