کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9868415 | 1530690 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Nano-resolution profiling of micro-structures using quantitative X-ray phase retrieval from Fraunhofer diffraction data
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک و نجوم (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Nano-resolution profiling of micro-structures using quantitative X-ray phase retrieval from Fraunhofer diffraction data Nano-resolution profiling of micro-structures using quantitative X-ray phase retrieval from Fraunhofer diffraction data](/preview/png/9868415.png)
چکیده انگلیسی
X-ray Fraunhofer diffraction data have been collected from a series of weakly thickness-modulated samples using a synchrotron source. Three different 10 μm wide areas of a linear Fresnel zone structure etched in a silicon wafer were studied. Each studied area included different number of zones, ranging from 6 to 20. Phase retrieval X-ray diffractometry technique was used for the experimental data analysis. The zone structure thickness profiles were mapped with a spatial resolution of 100 nm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physics Letters A - Volume 335, Issues 5â6, 21 February 2005, Pages 494-498
Journal: Physics Letters A - Volume 335, Issues 5â6, 21 February 2005, Pages 494-498
نویسندگان
A.V. Darahanau, A.Y. Nikulin, A. Souvorov, Y. Nishino, B.C. Muddle, T. Ishikawa,