کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9952755 | 1461820 | 2018 | 14 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Wireless passive pressure sensor based on sapphire direct bonding for harsh environments
ترجمه فارسی عنوان
سنسور فشار غیر فعال بی سیم بر اساس اتصال مستقیم یاقوت کبود برای محیط های خشن
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کلمات کلیدی
سنسور فشار بالا دما، بی سیم غیر فعال، سفال پیوند مستقیم، محیط خشن،
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
This study presents a wireless passive high-temperature pressure sensor based on sapphire direct bonding technology. The design, fabrication, and measurement of the sensor are demonstrated and discussed. Single-crystal sapphire is used to fabricate the sensor owing to its outstanding characteristics, and the prototype sensor consists of an inductance, a variable capacitance, and an embedded vacuum-sealed cavity formed by sapphire direct bonding. Compared with other manufacturing technologies, the sapphire direct bonding process is simple and can effectively avoid the deformation and collapse of the embedded cavity, thereby leading to a better sensor performance. A more compact sensor with greater sensitivity has been fabricated in this study. The copper interrogating antenna is employed to detect the variation in the sensor's resonant frequency caused by the pressure applied. The characterization in high-temperature pressure environments successfully demonstrates the sensing capabilities for pressures from 20âkPa to 600âkPa up to 600â°C. At 600â°C, the sensor sensitivity reaches as high as 10âkHz/kPa. The proposed sensor can be applied for the monitoring of gas pressure in harsh environments, such as environments with high temperatures and chemical corrosion.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 280, 1 September 2018, Pages 406-412
Journal: Sensors and Actuators A: Physical - Volume 280, 1 September 2018, Pages 406-412
نویسندگان
Wangwang Li, Ting Liang, Wenyi Liu, Pinggang Jia, Yulei Chen, Jijun Xiong, Cheng Lei, Yingping Hong, Yongwei Li,