کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9952760 | 1461820 | 2018 | 29 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A closed-form approach for the resonant frequency analysis of clamped rectangular microplates under distributed electrostatic force
ترجمه فارسی عنوان
یک رویکرد فرم بسته برای تجزیه و تحلیل فرکانس رزونانس میکرو پلات های مستطیلی تحت فشار تحت نیروی الکترواستاتیکی توزیع
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کلمات کلیدی
میکروپلاستیک الکترواستاتیک، فرکانس رزونانس، مدل کاهش یافته سفارش تجزیه و تحلیل یک حالت، عبارات فرم بسته میکرو پلات های چند لایه،
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
This paper proposes a fast-converged reduced-order model for small vibrations of electrostatically actuated rectangular microplates around their deformed states. On this foundation, one-mode analysis method and thus closed-form analytical expressions are developed for the fundamental resonant frequency analysis. Numerical multi-mode analysis is conducted to investigate the convergence. It is concluded that the one-mode analysis method can give a converged solution, which demonstrates that the proposed model has a faster convergence than previous models where multi modes are needed. The directly calculated resonant frequencies by the closed-form expressions are in good agreement with the numerical results by FEM simulations with less than 5% variation before pull-in. Parametric study shows the closed-form expressions are applicable to the cases in which the thickness is less than 1/20 of the length and width under a nominal length to width ratio of 1â¼2.5, and the gap distance is less than or equal to the thickness of the microplate. Additionally, a kind of electrostatic configurations based on multilayer microplates, capacitive micromachined ultrasonic transducers (CMUTs), were used to experimentally validate the closed-form expressions and good agreement was observed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 280, 1 September 2018, Pages 447-458
Journal: Sensors and Actuators A: Physical - Volume 280, 1 September 2018, Pages 447-458
نویسندگان
Zhikang Li, Libo Zhao, Zhuangde Jiang, Yihe Zhao, Jie Li, Jiawang Zhang, Yulong Zhao, Liwei Lin,