Analysis of HSG-7000 silsesquioxane-based low-k dielectric hot plate curing using Raman spectroscopy Fulltext Access 5 Pages 2006
Characteristics of thermal distortions of the laser mirror substrates filled with phase-change materials Fulltext Access 5 Pages 2006
A flexible new three-dimensional measurement technique by projected fringe pattern Fulltext Access 5 Pages 2006
Propagation of vectorial nonparaxial Gaussian beams through an annular aperture Fulltext Access 5 Pages 2006
An unusual phenomenon observed when anodising CP titanium to produce coloured surfaces for jewellery and other decorative uses Fulltext Access 5 Pages 2006
Visualization of scavenging flow in the design of small two-stroke engines Fulltext Access 5 Pages 2006
On the profile of temperature dependent series resistance in Al/Si3N4/p-Si (MIS) Schottky diodes Fulltext Access 5 Pages 2006
Fabrication of various curved relief structures through concave surface forming and soft replica molding Fulltext Access 5 Pages 2006
Diffusion barrier performance of W/Ta–W–N double layers for Cu metallization Fulltext Access 5 Pages 2006
Fabrication of multi-dimensional colloid crystals on raised surfaces via reversal nanoimprint lithography Fulltext Access 5 Pages 2006
Control of the pulse width of a laser-diode end-pumped passively Q-switched solid-state laser Fulltext Access 5 Pages 2006
Effect of the spatial distribution of SiO2 thickness on the switching behavior of bistable MOS tunnel structures Fulltext Access 5 Pages 2006
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity Fulltext Access 5 Pages 2006
Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography Fulltext Access 5 Pages 2006
Inkjet printed silver source/drain electrodes for low-cost polymer thin film transistors Fulltext Access 5 Pages 2006
Study of ultrathin vanadium nitride as diffusion barrier for copper interconnect Fulltext Access 5 Pages 2006
Thermal analysis for step and flash imprint lithography during UV curing process Fulltext Access 5 Pages 2006
Frequency dependent capacitance and conductance–voltage characteristics of Al/Si3N4/p-Si(1 0 0) MIS diodes Fulltext Access 5 Pages 2006
Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding Fulltext Access 5 Pages 2006
Selectivity of similar compounds' identification using IR spectrometry: β-Lactam antibiotics Fulltext Access 5 Pages 2006
Hydrogen-bonded materials based on organic tautomeric molecules: Theoretical treatment Fulltext Access 5 Pages 2006
FT-IR study on solvent effects in building blocks of bioactive compounds. V Fulltext Access 5 Pages 2006
Water chain and water tapes in the crystals of brucinium chlorate(VII) dihydrate and brucinium dihydrogen phosphate(V) 6.15 hydrate Fulltext Access 5 Pages 2006
Synthesis, crystal structure and third-order nonlinear optical properties of heterometallic cluster [WM2S4(Pph3)3]·DMF (M2=1.25Ag+0.75Cu) Fulltext Access 5 Pages 2006
Molecular structure of 8-hydroxy-1-methylquinolinium iodide hydrate in crystal and solution Fulltext Access 5 Pages 2006
The intramolecular hydrogen bonds in some Schiff bases derived from dendrimers: DAB-Am-8 and PAMAM-G2 Fulltext Access 5 Pages 2006
Application of theoretically computed chemical shifts to structure determination of novel heterocyclic compounds Fulltext Access 5 Pages 2006
Synthesis, crystal structure and photoluminescence of 3-(1-benzotriazole)-4-methyl-coumarin Fulltext Access 5 Pages 2006
Reorienatational dynamics of cholesterol molecules in thin film surrounded carbon nanotube: Molecular dynamics simulations Fulltext Access 5 Pages 2006
Europium-doped lead fluoroborate glasses: Structural, thermal and optical investigations Fulltext Access 5 Pages 2006
Charge transfer in films of (BEDT-TTF)-based molecular conductors as seen by Raman spectroscopy Fulltext Access 5 Pages 2006
Vertically aligned GaN nanotubes – Fabrication and current image analysis Fulltext Access 5 Pages 2006
Spectroscopic investigation of herpes simplex viruses infected cells and their response to antiviral therapy Fulltext Access 5 Pages 2006
Modeling of the structure and vibrational spectra of 2-biphenylmethanol using B3LYP method Fulltext Access 5 Pages 2006
Complementarity principle in heteromeric assembling via NH⋯O, CH⋯O, CH⋯π, and π⋯π interactions in the crystal structure of [(1R)-2-(benzyloxy)-2-oxo-1-phenylethyl]ammonium 4-methyl-1-benzenesulphonate Fulltext Access 5 Pages 2006
Magnetic properties of copper(II) complexes containing peptides. Crystal structure of [Cu(phe-leu)] Fulltext Access 5 Pages 2006
m-Tolunitrile-H2O complex: Isomers and methyl torsional potentials analyzed by the time-dependent density-functional theory Fulltext Access 5 Pages 2006
The nature of the products of deprotonation of disulfonyl carbon acids in acetonitrile solvent Fulltext Access 5 Pages 2006
Structural and spectroscopic characterization of bis(thiosaccharinato)bis(benzimidazole)cadmium(II) Fulltext Access 5 Pages 2006
Solvent effects in the 2JHH, 3JHH, 1JNC and 2JNC coupling constants in the NMR spectrum of acetylcholine chloride Fulltext Access 5 Pages 2006
In situ synthesis of a three-dimensional supramolecular architecture from modified flexible ligand Fulltext Access 5 Pages 2006
Efficient diode-pumped intracavity frequency-doubled CW Nd : YLF laser emitting in the red Fulltext Access 5 Pages 2006
Density functional study of the stability and electronic properties of TaxNy compounds used as copper diffusion barriers Fulltext Access 5 Pages 2006
Microstructure and material properties of electroless CoWP films obtained from sulfamate solutions Fulltext Access 5 Pages 2006
CMP characteristics and optical property of ITO thin film by using silica slurry with a variety of process parameters Fulltext Access 5 Pages 2006
Chip-to-chip interconnections based on the wireless capacitive coupling for 3D integration Fulltext Access 5 Pages 2006
Wide band frequency and in situ characterisation of high permittivity insulators (High-K) for H.F. integrated passives Fulltext Access 5 Pages 2006
Correlation between trench depth and TDDB thermal activation energy in single damascene Cu/SiOC:H Fulltext Access 5 Pages 2006
Phase effects and short gate length device implementation of Ni fully silicided (FUSI) gates Fulltext Access 5 Pages 2006
Different approaches to integrate patterned buried CoSi2 layers in SOI substrates Fulltext Access 5 Pages 2006
Dependence of CMP-induced delamination on number of low-k dielectric films stacked Fulltext Access 5 Pages 2006
Characterization of imprinting polymeric temperature variation with fluorescent Rhodamine B molecule Fulltext Access 5 Pages 2006
Multibeam electron source for nanofabrication using electron beam induced deposition Fulltext Access 5 Pages 2006
Nanoscale imaging with a portable field emission scanning electron microscope Fulltext Access 5 Pages 2006
Transitioning of direct e-beam write technology from research and development into production flow Fulltext Access 5 Pages 2006
Measuring the Young’s modulus of ultralow-k materials with the non destructive picosecond ultrasonic method Fulltext Access 5 Pages 2006
Template synthesis of carbon nanotubes from porous alumina matrix on silicon Fulltext Access 5 Pages 2006
Capacitance non-linearity study in Al2O3 MIM capacitors using an ionic polarization model Fulltext Access 5 Pages 2006
Electrical properties and thermal stability of MOCVD grown Ru gate electrodes for advanced CMOS technology Fulltext Access 5 Pages 2006
Material and electrical characterization of TMS-based silicidation of the Cu-dielectric barrier interface for electromigration improvement of 65 nm interconnects Fulltext Access 5 Pages 2006
Reliability issues in Cu/low-k structures regarding the initiation of stress-voiding or crack failure Fulltext Access 5 Pages 2006
Effects of electromigration on microstructural evolution of eutectic SnPb flip chip solder bumps Fulltext Access 5 Pages 2006
Influence of mass density and mechanical properties on the surface acoustic wave velocity dispersion Fulltext Access 5 Pages 2006
Properties of 50 nm electroless films Ag–W–oxygen before and after low temperature, low activation energy resistivity decay Fulltext Access 5 Pages 2006
High frequencies characterization of Cu-MIM capacitors in parallel configuration for advanced integrated circuits Fulltext Access 5 Pages 2006
Evaluation of air gap structures produced by wet etch of sacrificial dielectrics: Extraction of keff for different technology nodes and film permittivity Fulltext Access 5 Pages 2006
Study of the post-etch cleaning compatibility with dense and porous ULK materials – characterization of the process impact Fulltext Access 5 Pages 2006
Characterization of the impact of plasma treatments and wet cleaning on a porous low k material Fulltext Access 5 Pages 2006
Chemical etching solutions for air gap formation using a sacrificial oxide/polymer approach Fulltext Access 5 Pages 2006
Impact of dummies on interconnects network HF propagation performances for the 65 nm node Fulltext Access 5 Pages 2006
Quantification of processing damage in porous low dielectric constant films Fulltext Access 5 Pages 2006
Tuning nickel silicide properties using a lamp based RTA, a heat conduction based RTA or a furnace anneal Fulltext Access 5 Pages 2006
Growth of Ru/RuO2 layers with atomic vapor deposition on plain wafers and into trench structures Fulltext Access 5 Pages 2006
Electrical properties of epitaxial NiSi2/Si contacts with extremely flat interface formed in Ni/Ti/Si(0 0 1) system Fulltext Access 5 Pages 2006
In situ study of the growth kinetics and interfacial roughness during the first stages of nickel–silicide formation Fulltext Access 5 Pages 2006