Improvement of ZnO TCO film growth for photovoltaic devices by reactive plasma deposition (RPD)
Keywords: 61.50.Nw; 61.72.-y; 61.72.Vv; 67.57.Hi; 72.80.Ey; 73.61.GaZnO; Zinc oxide; Ion plating; II–VI; Transparent conductive oxide; Large size; High growth rate