
Deposition of ZnO thin films on SiO2/Si substrate with Al2O3 buffer layer by radio frequency magnetron sputtering for high frequency surface acoustic wave devices
Keywords: 77.84 ثانیه; 77.84-s; 81.05.Dz; 81.15.Cd; 85.50-nAluminum oxide; Piezoelectric effect; Sputtering; Zinc oxide