HVPE of scandium nitride on 6H-SiC(0Â 0Â 0Â 1)
Keywords: 81.05Ea; 61.05cp; 61.72sd; 81.15Kk; 81.70Jb; A1. Impurities; A1. X-ray diffraction; A3. Hydride vapor phase epitaxy; B1. Nitrides; B2 Semiconducting III-V materials;