Nano-cell fabrication on semiconductor utilizing self-organizational behavior of point defects induced by ion beam
Keywords: 61.72.Vv; 61.82.Fk; 68.37.Hk; 81.05.Ea; 81.16.Rf; 81.16.-c; 87.17.-d; Focussed ion beam; Void; Self-organization; Ion-implantation; Cellular structure; Nano-fabrication;