
Indirect in situ characterization of Si(1 0 0) substrates at the initial stage of III–V heteroepitaxy
Keywords: A1. In situ monitoring; A1. Reflectance anisotropy spectroscopy; A1. Si(100) surfacestructure; A1. Transmission electron microscopy; A3. Polar on non-polarepitaxy; B1. Gallium phosphide