CFD coupled kinetic modeling and simulation of hot wall vertical tubular reactor for deposition of SiC crystal from MTS
Keywords: MTS; methyltrichlorosilane; C/C; carbon-carbon; CVD; chemical vapor deposition; lpm; Litre (standard) Per Minute; Silicon carbide; Chemical vapor deposition; Tubular reactor; Computational fluid dynamics; Modeling and simulation; Reaction kinetics; Methyl