Enhancement of dielectric barrier layer properties by sol-gel and PECVD stacks
Keywords: PECVD, Plasma Enhanced Chemical Vapor Deposition; CTE, coefficient of thermal expansion; Rt, peak-to-valley roughness; TOF-SIMS, Time-of-Flight Secondary Ion Mass Spectrometry; SEM, Scanning Electron Microscopy; SIMS, Secondary Ion Mass Spectrometry; XRD,