Atomic layer deposition and characterization of zirconium oxide-erbium oxide nanolaminates
Keywords: حمل و نقل الکتریکی (هدایت، مقاومت، تحرک و غیره); Atomic layer deposition; X-ray scattering; Diffraction and reflection; Crystallization; Electrical transport (conductivity, resistivity, mobility, etc.); Rare earth metals; Oxides; Thin film structures; Insulating films;