
Microstructural investigation of nickel silicide thin films and the silicide–silicon interface using transmission electron microscopy
Keywords: 68.37.Lp; 79.20.Uv; 68.35.Ct; 61.14.Lj; 61.10.Nz; 81.05.JeNickel silicide; TEM; EFTEM; SAED; Glancing angle XRD