Sputtering yields, range and range straggling in Al following Kr+ ions bombardment in the energy range (20-160)Â keV
Keywords: گستردگی محدوده; 68.49.Sf; 82.80.Yc; 34.50.Bw; Sputtering yields; Rutherford backscattering (RBS) technique; Stopping power; Projected range; Range straggling;