
Integrated characterization study of diamond like carbon (DLC) synthesized by 2.45Â GHZ microwave electron cyclotron resonance (ECR) plasma CVD
Keywords: زیرزمین; Diamond like carbon; Electron cyclotron resonance; Raman effect; Spectroscopic ellipsometry; X-ray reflectivity; Contact angle; Surface roughness; X-ray photoelectron spectroscopy; Subplantation; Quantum electronic activation;