The influence of laser-induced surface modifications on the backside etching process
Keywords: 81.65.Cf; 81.20.Wk; 81.05.Ke; 79.20.D; 61.80.B; 42.55.L; 42.62.C; 78.40.Ha; Laser; Ablation; Etching; Fused silica; Liquid; Absorption; Temperature calculations;