کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10134210 | 1645608 | 2018 | 17 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Sensing properties controlled by thickness variable of palladium oxide synthesized by RF-reactive sputtering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Palladium oxide (PdO) thin films were deposited by RF reactive magnetron sputtering onto glass substrates. The argon and oxygen partial pressures were (9.43âÃâ10â3âTorr) and (1.87âÃâ10â2âTorr) at room temperature respectively. The thicknesses of the deposited films were in the range of about (50-150ânm). Necessary thickness, structural, electrical and sensing properties of PdO films were methodically examined. X-ray diffraction method has shown a polycrystalline structure with a preferred reflection peak at (220) plane. The scanning electron microscope analysis has revealed a growth of nanoparticles in all prepared films. Electrical properties have shown strong dependence on thickness variation. Gas sensitivity of nitrogen dioxide and hydrogen gases were about (91%) and (90%) respectively. It was observed that gas sensitivity of PdO thin films increases as the film thickness increases.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - Volume 174, December 2018, Pages 481-488
Journal: Optik - Volume 174, December 2018, Pages 481-488
نویسندگان
Ehssan S. Hassan, Ahmed N. Abd, Nadir F. Habubi, Hazim L. Mansour,