کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10365685 872161 2014 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Nanotribological properties of ALD-processed bilayer TiO2/ZnO films
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Nanotribological properties of ALD-processed bilayer TiO2/ZnO films
چکیده انگلیسی
With respect to tribology, increased friction causes plastic deformation between the TiO2 and ZnO films, in addition to delamination and particle loosening. The plastic deformation caused by adhesion and/or cohesion failure is reflected in the nanoscratch traces. The pile-up events at a loading penetration of 30 nm were measured at 21.8 μN for RT, 22.4 μN for 300 °C, and 36 μN for 400 °C. In comparison to the other conditions, the TiO2/ZnO films annealed at 400 °C exhibited higher scratch resistance and friction with large debris, indicating the wear volume is reduced with increased annealing temperature and loading.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 54, Issue 12, December 2014, Pages 2754-2759
نویسندگان
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