کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10400079 | 890876 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی هوافضا
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
To enhance the accuracy of nanopositioning and the metrological capability of scanning probe microscopy, we construct a two-dimensional interferometric nanopositioning system consisting of rectilinear flexure stage, calibrated laser interferometer, and digital feedback control system. We implement a correlation matrix, determined by the piezoelectric constant and the crosstalk between two axes, into the closed-loop control algorithm to compensate the nonlinearity and the crosstalk of the PZT-driven stage. In the tests on nanopositioning, the 1-nm-step motion and the tracking along a 1-nm-radius circular target path are accomplished to verify the short-term repeatability and the subnanometer-level precision. Additionally, a scanning tunneling microscope equipped with the interferometric nanopositioning system is built up to demonstrate the metrological functions of scanning probe microscopy.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Control Engineering Practice - Volume 13, Issue 5, May 2005, Pages 559-566
Journal: Control Engineering Practice - Volume 13, Issue 5, May 2005, Pages 559-566
نویسندگان
Hsien-Chi Yeh, Wei-Tou Ni, Sheau-shi Pan,