Hybrid numerical-experimental approach for investigation of dynamics of microcantilever relay system

The time average holography measurements of the vibrating microelectromechanical switch (MEMS) were performed in this study. Experimental measurement results exhibit good agreement with computer generated holographic interferogram analysis. The validation of experimental investigations versus numerical analysis provides the necessary background to analyze the dynamical characteristics of micromechanical systems in virtual numerical environments. Direct application of fringe counting techniques for reconstruction of motion from time average holograms cannot be straightforward if the analyzed micromechanical systems contain motion limiters. Modifications of a classical time average holographic technique enable qualitative analysis of MEMS and can be applied for investigation of dynamical properties of much broader classes of MEMS systems.