کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10410891 | 894532 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A gel-based wafer-level testing procedure for microelectrodes
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی آنالیزی یا شیمی تجزیه
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چکیده انگلیسی
In this study, we demonstrate a novel impedance measurement procedure for microelectrodes. The concept is based on the use of a saline gel and enables relatively quick measurement at wafer level. In order to verify the procedure, measurements were first carried out with a saline gel as electrolyte, and then compared to a reference measurement in a conventional saline solution. The impedance as function of frequency was investigated for two different electrode sizes, and showed good agreement between the two types of electrolytes. The testing procedure described in this paper can be applied at wafer level to biomedical microsystems that must interact with a wet environment.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators B: Chemical - Volume 107, Issue 2, 29 June 2005, Pages 557-562
Journal: Sensors and Actuators B: Chemical - Volume 107, Issue 2, 29 June 2005, Pages 557-562
نویسندگان
Maria Kindlundh, Peter Norlin,