Study of deposition of gas sensing films on quartz crystal microbalance using an ultrasonic atomizer

A novel method for depositing gas sensing films on quartz crystal microbalance electrodes was developed. The method is based on the production of a fine mist of the solution with the sensing material by means of an ultrasonic atomizer. The mist is transported by a dry air flow to the quartz substrate allowing its deposition. The responses of the sensors are compared with those fabricated by spray coating method. It was found that even liquid films such as Apiezon L that were not stably deposited on polished gold electrodes by the spray method could be stably deposited using the atomizer, and an improvement of the reproducibility and sensitivity of the sensor response was achieved.