کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10412287 | 894885 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Nonlinear mechanical effects in silicon longitudinal mode beam resonators
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Nonlinear mechanical effects in silicon longitudinal mode beam resonators Nonlinear mechanical effects in silicon longitudinal mode beam resonators](/preview/png/10412287.png)
چکیده انگلیسی
The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen for the analysis due to their simple geometry and high quality factor (Q>100000). Analytical model for the resonator is developed in terms of nonlinear engineering Young's modulus that incorporates both geometrical and material effects. For comparison with the theory, beam resonators were fabricated in two different crystalline directions. The measured nonlinearity is larger for beams in [1â1â0] direction than for beams in [1â0â0] direction in agreement with the theoretical prediction. The results provide a quantitative value for the appearance of the material-induced nonlinear effects in single-crystal silicon microresonators.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 120, Issue 1, 29 April 2005, Pages 64-70
Journal: Sensors and Actuators A: Physical - Volume 120, Issue 1, 29 April 2005, Pages 64-70
نویسندگان
Ville Kaajakari, Tomi Mattila, Antti Lipsanen, Aarne Oja,